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Reticle Storage Product List

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Clean equipment-related products Reticle storage cabinet [Custom case]

Clean equipment-related products Reticle storage cabinet [Custom case]

This is a cleanroom-compatible storage cabinet made of all stainless steel.

The clean equipment-related product, the reticle storage cabinet, uses ultra-high molecular polyethylene, which has excellent wear resistance, for the reticle holder. It is equipped with a clean module unit on the back, ensuring that the interior is always in a clean state. The holder is custom-made to fit the shape of the reticle case. The external dimensions are W1140×D673×H1430mm, with a chamber opening of W510×H330mm, and it can store 60 pieces. The filter in the clean module unit has a dust collection efficiency of over 99.99% at 0.3μm. For more details, please contact us or refer to the catalog.

  • Other clean room equipment and facilities
  • Reticle Storage

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Reticle Storage Facility R5-215

Reticle Storage Facility R5-215

Store reticle cases in a clean environment! Space-saving and capable of large storage! Case management can be easily performed!

Features｜ ● Equipped with a clean module unit to keep the interior clean. ● Reticle cases can be stored in a clean environment. ● Custom manufacturing is possible according to the number of tiers and rows of the reticle cases to be stored. Please feel free to contact us.

  • Other clean room equipment and facilities
  • Reticle Storage

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